ISO 100 Mounting Flange

A high-vacuum compatible loadlock system is an efficient, cost-effective method of loading substrates into a vacuum chamber without breaking vacuum. Loading the substrate into an introduction-chamber (loadlock) and evacuating the loadlock prior to transferring the substrate into the main chamber saves a significant amount of time in reaching the required operating pressure. Without repeated venting to atmospheric pressure, the main chamber remains cleaner and dryer. There are many unique magnetically-coupled transfer devices available for sample introduction.

Loadlock chambers can be constructed to a user-specified size with choices of materials, mounting flanges, pump and auxiliary ports, windows or blank-offs and transporters. Mounting flanges can be standard CFF, NW/ISO or custom. Shown below are examples of a few of the loadlocks provided using various sized NW/ISO mounting flanges. Each system can be ordered as shown or reconfigured to meet your specific requirements.

Specifications

Chamber body Welded stainless steel electropolish finish
Sample loading Quick access, top door, door sealed with Viton o-ring
Mounting flange ISO 100
Accessory ports Two NW 16
Pump port ISO 63
Max single sample size 3” wide x 1” high x 3” long
Magnetic transporter Model DBLRP shown in example. Several models could be used.
Vacuum level < 5×10-8 Torr with appropriate pumping
Initial application Introduction of small sample holder to cryogenic probing system
Upgrades available
Specifications subject to change without notice.